Modern Magnetic Systems
Article
2013
Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays
| Author(s): | Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Grévent, C. and Szeghalmi, A. V. and Knez, M. and Weigand, M. and Snigireva, I. and Snigirev, A. and Salditt, T. and Schütz, G. |
| Journal: | {Proceedings of SPIE (The International Society for Optical Engineering)} |
| Volume: | 8851 |
| Year: | 2013 |
| Bibtex Type: | Article (article) |
| DOI: | 10.1117/12.2027251 |
| Electronic Archiving: | grant_archive |
| Language: | eng |
BibTex
@article{escidoc:0224,
title = {{Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays}},
journal = {{Proceedings of SPIE (The International Society for Optical Engineering)}},
volume = {8851},
year = {2013},
slug = {escidoc-0224},
author = {Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Gr\'event, C. and Szeghalmi, A. V. and Knez, M. and Weigand, M. and Snigireva, I. and Snigirev, A. and Salditt, T. and Sch\"utz, G.}
}