Modern Magnetic Systems
Article
2021
Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper
| Author(s): | Dogan, G. and Chiu, F. and Chen, S. U. H. and David, M. R. T. and Michalowski, A. and Schänzel, M. and Silber, C. and Schütz, G. and Grévent, C. and Keskinbora, K. |
| Journal: | Materials & Design |
| Volume: | 210 |
| Pages: | 110114 |
| Year: | 2021 |
| Publisher: | Elsevier Ltd. |
| Bibtex Type: | Article (article) |
| DOI: | 10.1016/j.matdes.2021.110114 |
| Electronic Archiving: | grant_archive |
| Language: | eng |
BibTex
@article{escidoc:3341902,
title = {Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper},
journal = {Materials & Design},
volume = {210},
pages = {110114},
publisher = {Elsevier Ltd.},
year = {2021},
slug = {escidoc-3341902},
author = {Dogan, G. and Chiu, F. and Chen, S. U. H. and David, M. R. T. and Michalowski, A. and Sch\"anzel, M. and Silber, C. and Sch\"utz, G. and Gr\'event, C. and Keskinbora, K.}
}