Micro, Nano, and Molecular Systems
Article
2015
Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications
Micro, Nano, and Molecular Systems
Jeong Hyeon-Ho
- Postdoctoral Researcher
Micro, Nano, and Molecular Systems
Andrew Mark
PostDoc, Petzow Prize winner (2015), now Manager of Optical Engineering at Metamaterial Technologies Inc. (MTI), Nova Scotia, Canada.
Micro, Nano, and Molecular Systems
Tung Chun Lee
PostDoc, now Lecturer, Institute for Materials Discovery, University College London
Micro, Nano, and Molecular Systems
Mariana Alarcon-Correa
- Postdoctoral Researcher
Micro, Nano, and Molecular Systems
Insook Kim
Micro, Nano, and Molecular Systems
Peer Fischer
Professor
A parallel nanolithographic patterning method is presented that can be used to obtain arrays of multifunctional nanoparticles. These patterns can simply be converted into a variety of secondary nanopatterns that are useful for nanolithographic imprint, plasmonic, and etch-mask applications.
| Author(s): | Jeong, H. H. and Mark, Andrew G. and Lee, Tung-Chun and Son, Kwanghyo and Chen, Wenwen and Alarcon-Correa, Mariana and Kim, Insook and Schütz, Gisela and Fischer, Peer |
| Journal: | Adv. Science |
| Volume: | 2 |
| Number (issue): | 7 |
| Pages: | 1500016 |
| Year: | 2015 |
| Bibtex Type: | Article (article) |
| DOI: | 10.1002/advs.201500016 |
| State: | Published |
| URL: | http://dx.doi.org/10.1002/advs.201500016 |
| Electronic Archiving: | grant_archive |
| Note: | Featured cover article. |
BibTex
@article{2015jeong,
title = {Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications},
journal = {Adv. Science},
abstract = {A parallel nanolithographic patterning method is presented that can be used to obtain arrays of multifunctional nanoparticles. These patterns can simply be converted into a variety of secondary nanopatterns that are useful for nanolithographic imprint, plasmonic, and etch-mask applications. },
volume = {2},
number = {7},
pages = {1500016},
year = {2015},
note = {Featured cover article.},
slug = {advs-advs201500016},
author = {Jeong, H. H. and Mark, Andrew G. and Lee, Tung-Chun and Son, Kwanghyo and Chen, Wenwen and Alarcon-Correa, Mariana and Kim, Insook and Sch{\"u}tz, Gisela and Fischer, Peer},
url = {http://dx.doi.org/10.1002/advs.201500016}
}