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Micro, Nano, and Molecular Systems Article 2014

Shape control in wafer-based aperiodic 3D nanostructures

Thumb ticker sm gibbs john
Micro, Nano, and Molecular Systems
John Gibbs
PostDoc, then Assistant Professor in Physics at Northern Arizona University, USA.
Thumb ticker sm peer fischer portrait
Micro, Nano, and Molecular Systems
Peer Fischer
Professor
Thumb ticker sm mark andrew
Micro, Nano, and Molecular Systems
Andrew Mark
PostDoc, Petzow Prize winner (2015), now Manager of Optical Engineering at Metamaterial Technologies Inc. (MTI), Nova Scotia, Canada.
Thumb ticker sm jeong hyeon ho2
Micro, Nano, and Molecular Systems
Jeong Hyeon-Ho
  • Postdoctoral Researcher
Toc image

Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate. <p>Cover article.<p>

Author(s): Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer
Journal: NANOTECHNOLOGY
Volume: 25
Number (issue): 23
Year: 2014
Bibtex Type: Article (article)
DOI: 10.1088/0957-4484/25/23/235302
Electronic Archiving: grant_archive
Note: Cover article.

BibTex 

@article{ISI:000336958900005,
  title = {Shape control in wafer-based aperiodic 3D nanostructures},
  journal = {NANOTECHNOLOGY},
  abstract = {Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.
  <p>Cover article.<p>},
  volume = {25},
  number = {23},
  year = {2014},
  note = {Cover article.},
  slug = {isi-000336958900005},
  author = {Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer}
}