Physical Intelligence
Modern Magnetic Systems
Article
2021
Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers
Modern Magnetic Systems
Gül Dogan
- Doctoral Researcher
Physical Intelligence
Sinan Ozgun Demir
- Postdoctoral Researcher
Robotic Materials
Cem Balda Dayan
- Postdoctoral Researcher
Modern Magnetic Systems
Umut Sanli
- Postdoctoral Researcher
Physical Intelligence
Utku Culha
Scientific Coordinator at Technical University of Munich
Physical Intelligence
Metin Sitti
Guest Researcher
Modern Magnetic Systems
Gisela Schütz
- Director
Modern Magnetic Systems
Kahraman Keskinbora
- Research Group Leader
| Author(s): | Dogan, Gül and Demir, Sinan O. and Gutzler, Rico and Gruhn, Herbert and Dayan, Cem B. and Sanli, Umut T. and Silber, Christian and Culha, Utku and Sitti, Metin and Schütz, Gisela and Grévent, Corinne and Keskinbora, Kahraman |
| Journal: | ACS Applied Materials and Interfaces |
| Volume: | 13 |
| Number (issue): | 45 |
| Pages: | 54503--54515 |
| Year: | 2021 |
| Publisher: | American Chemical Society |
| Bibtex Type: | Article (article) |
| DOI: | 10.1021/acsami.1c14586 |
| Address: | Washington, DC |
| Electronic Archiving: | grant_archive |
| Language: | eng |
BibTex
@article{doi:10.1021/acsami.1c14586,
title = {Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers},
journal = {ACS Applied Materials and Interfaces},
volume = {13},
number = {45},
pages = {54503--54515},
publisher = {American Chemical Society},
address = {Washington, DC},
year = {2021},
slug = {doi-10-1021-acsami-1c14586},
author = {Dogan, G{\"u}l and Demir, Sinan O. and Gutzler, Rico and Gruhn, Herbert and Dayan, Cem B. and Sanli, Umut T. and Silber, Christian and Culha, Utku and Sitti, Metin and Sch{\"u}tz, Gisela and Grévent, Corinne and Keskinbora, Kahraman}
}