Physical Intelligence
Article
2009
Towards automated nanoassembly with the atomic force microscope: A versatile drift compensation procedure
Author(s): | Krohs, Florian and Onal, Cagdas and Sitti, Metin and Fatikow, Sergej |
Journal: | Journal of Dynamic Systems, Measurement, and Control |
Volume: | 131 |
Number (issue): | 6 |
Pages: | 061106 |
Year: | 2009 |
Publisher: | American Society of Mechanical Engineers |
Bibtex Type: | Article (article) |
Electronic Archiving: | grant_archive |
BibTex
@article{krohs2009towards, title = {Towards automated nanoassembly with the atomic force microscope: A versatile drift compensation procedure}, journal = {Journal of Dynamic Systems, Measurement, and Control}, volume = {131}, number = {6}, pages = {061106}, publisher = {American Society of Mechanical Engineers}, year = {2009}, slug = {krohs2009towards}, author = {Krohs, Florian and Onal, Cagdas and Sitti, Metin and Fatikow, Sergej} }