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Optimizing the fabrication of diffractive optical elements using a focused ion beam system
@article{escidoc:0184, title = {{Optimizing the fabrication of diffractive optical elements using a focused ion beam system}}, journal = {{Proceedings of SPIE}}, volume = {9130}, year = {2014}, slug = {escidoc-0184}, author = {Vijayakumar, A. and Eigenthaler, U. and Keskinbora, K. and Sridharan, G. M. and Pramitha, V. and Hirscher, M. and Spatz, J. P. and Bhattacharya, S.} }