@mastersthesis{escidoc:0507,
  title = {{Herstellung und Charakterisierung d\"unner Niob-Schichten auf verschiedenen Substraten}},
  school = {Universit\"at Stuttgart},
  address = {Stuttgart},
  year = {2007},
  slug = {escidoc-0507},
  author = {Mayer, M. W. R.}
}