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Article 2019

Preferential sputtering effects in depth profiling of multilayers with SIMS, XPS and AES

Author(s): Hofmann, S. and Zhou, G. and Kovac, J. and Drev, S. and Lian, S. Y. and Lin, B. and Liu, Y. and Wang, J. Y.
Journal: Applied Surface Science
Volume: 483
Pages: 140--155
Year: 2019
Publisher: Elsevier B.V.
Bibtex Type: Article (article)
DOI: 10.1016/j.apsusc.2019.03.211
Address: Amsterdam
Electronic Archiving: grant_archive
Language: eng

BibTex 

@article{escidoc:3149039,
  title = {Preferential sputtering effects in depth profiling of multilayers with SIMS, XPS and AES},
  journal = {Applied Surface Science},
  volume = {483},
  pages = {140--155},
  publisher = {Elsevier B.V.},
  address = {Amsterdam},
  year = {2019},
  slug = {escidoc-3149039},
  author = {Hofmann, S. and Zhou, G. and Kovac, J. and Drev, S. and Lian, S. Y. and Lin, B. and Liu, Y. and Wang, J. Y.}
}