@article{escidoc:3341902,
  title = {Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper},
  journal = {Materials & Design},
  volume = {210},
  pages = {110114},
  publisher = {Elsevier Ltd.},
  year = {2021},
  slug = {escidoc-3341902},
  author = {Dogan, G. and Chiu, F. and Chen, S. U. H. and David, M. R. T. and Michalowski, A. and Sch\"anzel, M. and Silber, C. and Sch\"utz, G. and Gr\'event, C. and Keskinbora, K.}
}