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Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection
@phdthesis{escidoc:3473323, title = {Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection}, school = {Universit{\"a}t Stuttgart}, address = {Stuttgart}, year = {2022}, slug = {escidoc-3473323}, author = {Dogan, G.}, url = {http://elib.uni-stuttgart.de/handle/11682/12303; urn:nbn:de:bsz:93-opus-ds-123032} }