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Shape control in wafer-based aperiodic 3D nanostructures
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate. <p>Cover article.<p>
@article{ISI:000336958900005, title = {Shape control in wafer-based aperiodic 3D nanostructures}, journal = {NANOTECHNOLOGY}, abstract = {Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate. <p>Cover article.<p>}, volume = {25}, number = {23}, year = {2014}, note = {Cover article.}, slug = {isi-000336958900005}, author = {Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer} }