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Method for producing an XUV and X-ray diffractive optic

2020

Patent

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Author(s): SANLI, Umut Tunca and Ceylan, Hakan and Sitti, Metin and SCHÜTZ, Gisela and Keskinbora, Kahraman
Year: 2020

Department(s): Physical Intelligence
Bibtex Type: Patent (patent)
Paper Type: Patent

Note: US Patent App. 16/979,121

BibTex

@patent{sanli2020method,
  title = {Method for producing an XUV and X-ray diffractive optic},
  author = {SANLI, Umut Tunca and Ceylan, Hakan and Sitti, Metin and SCH{\"U}TZ, Gisela and Keskinbora, Kahraman},
  year = {2020},
  note = {US Patent App. 16/979,121},
  doi = {}
}