@patent{sanli2020method,
  title = {Method for producing an XUV and X-ray diffractive optic},
  year = {2020},
  note = {US Patent App. 16/979,121},
  slug = {sanli2020method},
  author = {SANLI, Umut Tunca and Ceylan, Hakan and Sitti, Metin and SCH{\"U}TZ, Gisela and Keskinbora, Kahraman}
}