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Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography
@article{escidoc:4123514, title = {Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography}, journal = {Optical Materials Express}, volume = {5}, number = {11}, pages = {2625-2633}, year = {2015}, slug = {escidoc-4123514}, author = {Bagheri, S. and Zgrabik, C. M. and Gissibl, T. and Tittl, A. and Sterl, F. and Walter, R. and De Zuani, S. and Berrier, A. and Stauden, T. and Richter, G. and Hu, E. L. and Giessen, H.} }