@article{escidoc:4123478,
  title = {A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching},
  journal = {Ultramicroscopy},
  volume = {171},
  pages = {82-88},
  year = {2016},
  slug = {escidoc-4123478},
  author = {Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B.}
}