A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching
2016
Article
zwe-csfm
| Author(s): | Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B. |
| Journal: | Ultramicroscopy |
| Volume: | 171 |
| Pages: | 82-88 |
| Year: | 2016 |
| Department(s): | ZWE Materialien |
| Bibtex Type: | Article (article) |
| DOI: | 10.1016/j.ultramic.2016.09.004 |
|
BibTex @article{escidoc:4123478,
title = {A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching},
author = {Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B.},
journal = {Ultramicroscopy},
volume = {171},
pages = {82-88},
year = {2016},
doi = {10.1016/j.ultramic.2016.09.004}
}
|
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