Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography
2019
Book
mms
Author(s): | Keskinbora, K. |
Volume: | SL48 |
Pages: | 46 |
Year: | 2019 |
Series: | {SPIE.Spotlight} |
Publisher: | SPIE Press |
Department(s): | Moderne Magnetische Systeme |
Bibtex Type: | Book (book) |
Address: | Bellingham, WA |
DOI: | 10.1117/3.2531118 |
Language: | eng |
State: | Published |
BibTex @book{escidoc:3060647, title = {{Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography}}, author = {Keskinbora, K.}, volume = {SL48}, pages = {46}, series = {{SPIE.Spotlight}}, publisher = {SPIE Press}, address = {Bellingham, WA}, year = {2019}, doi = {10.1117/3.2531118} } |