@incollection{escidoc:0267,
  title = {{Rutherford Backscattering}},
  booktitle = {{Nanoelectronics and Information Technology. Advanced Electronic Materials and Novel Devices}},
  pages = {250--252},
  publisher = {WILEY-VCH Verlag},
  address = {Weinheim, Germany},
  year = {2012},
  slug = {escidoc-0267},
  author = {Carstanjen, H. D.}
}